3D Profiling and Surface Roughness (Keyence VK-X3000 Confocal Microscope)
About
The Keyence Digital Microscope is used in Protofab to perform high-resolution optical inspection, dimensional measurement, surface characterization, and documentation of micro- and opto-electronic devices and components.
Application
- Die attach inspection (epoxy, eutectic, or solder joints)
- Wire bond inspection (ball, wedge, stitch, stud bumps)
- Optical alignment verification (fiber attach, free-space optics)
- Surface topography and defect inspection (scratches, voids, residues)
- Dimensional measurements (feature size, pitch, height, coplanarity)
- Documentation and image capture for reports, travelers, and failure analysis
System Overview
Operating Procedure and User's Manual
Keyence VK-X3000 Confocal Microscope SOP
Keyence VK-X3000 User's Manual
Ref Manual for Multifile Analyzer Software
Ref Manual for Viewer Application: Film Thickness and Stitching Module
Application Specific Quick Start Guides
Profile Measurements
Average Step Height Measurement (Flatness)
Gathering New Film Thickness Data
Surface Roughness Measurement
Volume & Area Measurement
Plane Measurement
Process Image
Batch Analysis Recommendation
Comparative Measurement
Gathering New Data using Laser Confocal
Teaching Module