3D Profiling and Surface Roughness (Keyence VK-X3000 Confocal Microscope)
3D Profiling and Metrology
| Tool Type | Confocal Microscope |
|---|---|
| Location | Protofab |
| Supervisor |
Arin Abed |
| Description | Keyence VK-X3000 |
About
The Keyence Digital Microscope is used in Protofab to perform high-resolution optical inspection, dimensional measurement, surface characterization, and documentation of micro- and opto-electronic devices and components.
Application
- Die attach inspection (epoxy, eutectic, or solder joints)
- Wire bond inspection (ball, wedge, stitch, stud bumps)
- Optical alignment verification (fiber attach, free-space optics)
- Surface topography and defect inspection (scratches, voids, residues)
- Dimensional measurements (feature size, pitch, height, coplanarity)
- Documentation and image capture for reports, travelers, and failure analysis
System Overview
The Keyence VK-X3000 (3050 variant with red 661nm laser) is a versatile, non-contact 3D laser scanning confocal microscope and optical profilometer. It is designed to capture high-definition color imaging alongside nanometer-level surface topography, roughness, and thickness measurements without requiring specialized sample preparation.
Laser Confocal Scanning: Employs a pinhole to reject out-of-focus light. The system maps the peak intensity of reflected light for every pixel as the Z-axis moves, yielding precise 3D topographies. It features a vertical resolution of 1nm.
Turret and Magnification: Equipped with a motorized 6-hole revolver holding various objective lenses (ranging from 2.5x to 50x). Total digital/optical system magnification ranges from 42x up to 9600x.
| Objective Lens | Total Magnification | Working Distance (mm/in) | Field of View |
|---|---|---|---|
| 2.5x | 42x - 480x | 8.8/0.35" | 675 × 506 µm to 7398 × 5545 µm |
| 5x | 84x - 960x | 22.5/0.89" | 337 × 253 µm to 3699 × 2773 µm |
| 10x | 168x - 1920x | 16.5/0.65” | 168 × 126 µm to 1849 × 1386 µm |
| 20x | 336x - 3840x | 3.1/0.12” | 84 × 63 µm to 924 × 693 µm |
| 20x LWD | 336x - 3840x | 20.5 0.81” | 84 × 63 µm to 924 × 693 µm |
| 50x | 840x - 9600x | 0.35/0.0138” | 33.7 × 25.2 µm to 370 × 277 µm |
Motorized XY Stage: Standard systems feature an automated stage with a travel range of 100mm x 100mm, supporting native frame-stitching to analyze wide areas automatically.
Operating Procedure and User's Manual
Keyence VK-X3000 Confocal Microscope SOP
Keyence VK-X3000 User's Manual
Ref Manual for Multifile Analyzer Software
Ref Manual for Viewer Application: Film Thickness and Stitching Module