Plasma Treatment (Glen Technologies, Yield Engineering, R3A Asher)
Plasma Treatment
| Tool Type | Plasma Chamber |
|---|---|
| Location | Protofab |
| Supervisor |
Arin Abed |
| Description | Yield Engineering R3A |
About
The Glen Technologies / Yield Engineering Systems (YES) R3A Asher is a low-frequency, batch-process plasma cleaning system designed for precise surface treatment of delicate electro-optical components and assemblies. It has a "downstream" mode for ESD sensitive components.
Application
- Contamination removal from surfaces and pads prior to assembly or wire bonding.
- Surface activation to enhance wetting and improve adhesion.
- Photoresist stripping which is not the primary use of this equipment in Protofab.
System Overview
The Glen Technologies R3A Asher is a 500W low-frequency system featuring a 14 x 14-inch, two-shelf configuration capable of holding multiple trays or wafers for surface treatment. The system provides three operational modes: Active Plasma for routine cleaning, RIE for aggressive etching, and Downstream for treating ESD-sensitive components, all controlled via a 40kHz Advanced Energy PE-1000 AC source.
Operating Procedure & User's Manuals
YES/GlenTech R3A Plasma Chamber SOP