Recipes: Plasma Treatment
The following is a baseline recipe for plasma cleaning. Oxygen plasma can be used for cleaning organic contamination, while Argon plasma can clean surface oxide.
| Gas | Pump down time | Purge time | Plasma time | Vent time | Plasma Power |
|---|---|---|---|---|---|
| A) Oxygen | 80 sec | 3 sec | 30 sec | 35 sec | 0.300 kW |
| B) Argon | 80 sec | 3 sec | 60 sec | 35 sec | 0.300kW |
- You may run gases in a two-sequence plasma cycle (GAS 1/A followed by GAS 2/B) or in individual single gas sequences. Running gases in sequence will result in lower vacuum reading.
- Run multiple cycles if longer plasma time is needed, rather than altering baseline recipe. Recipe settings may only be altered by Protofab Staff.
- The maximum plasma power is 0.300 kW and will be locked at this setting.