Recipes: Plasma Treatment: Difference between revisions
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created plasma cleaning recipe table |
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The following is a baseline recipe for plasma cleaning. Oxygen plasma can be used for cleaning organic contamination, while Argon plasma can clean surface oxide. |
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"Under Development" |
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{| class="wikitable" |
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|+Baseline Plasma Cleaning Recipe |
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!Gas |
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!Pump down time |
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!Purge time |
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!Plasma time |
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!Vent time |
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!Plasma Power |
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|- |
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|A) Oxygen |
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|80 sec |
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|3 sec |
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|30 sec |
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|35 sec |
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|0.300 kW |
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|- |
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|B) Argon |
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|80 sec |
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|3 sec |
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|60 sec |
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|35 sec |
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|0.300kW |
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|} |
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* Running gases in sequence may be done by selecting the option to run Gas A then Gas B. Or you may run a full cycle of Gas A, then a full cycle of Gas B. Running gases in sequence will result in lower vacuum reading. |
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* Run multiple cycles if longer plasma time is needed, rather than altering baseline recipe. Recipe settings may only be altered by Protofab Staff |
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* The maximum plasma power is 0.300 kW and will be locked at this setting. |
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Revision as of 11:21, 11 September 2026
The following is a baseline recipe for plasma cleaning. Oxygen plasma can be used for cleaning organic contamination, while Argon plasma can clean surface oxide.
| Gas | Pump down time | Purge time | Plasma time | Vent time | Plasma Power |
|---|---|---|---|---|---|
| A) Oxygen | 80 sec | 3 sec | 30 sec | 35 sec | 0.300 kW |
| B) Argon | 80 sec | 3 sec | 60 sec | 35 sec | 0.300kW |
- Running gases in sequence may be done by selecting the option to run Gas A then Gas B. Or you may run a full cycle of Gas A, then a full cycle of Gas B. Running gases in sequence will result in lower vacuum reading.
- Run multiple cycles if longer plasma time is needed, rather than altering baseline recipe. Recipe settings may only be altered by Protofab Staff
- The maximum plasma power is 0.300 kW and will be locked at this setting.