Recipes: Plasma Treatment

The following is a baseline recipe for plasma cleaning. Oxygen plasma can be used for cleaning organic contamination, while Argon plasma can clean surface oxide contamination.

Baseline Plasma Cleaning Recipe

Gas	Pump down time	Purge time	Plasma time	Vent time	Plasma Power
A) Oxygen	80 sec	3 sec	60 sec	35 sec	0.300 kW
B) Argon	80 sec	3 sec	60 sec	35 sec	0.300kW

• You may run gases in a two-sequence plasma cycle (GAS 1/A followed by GAS 2/B) or in individual single gas sequences. Running gases in sequence will result in lower pressure reading.

• Run multiple cycles if longer plasma time is needed (up to two minutes), rather than altering baseline recipe. Recipe settings may only be altered by Protofab Staff. Reach out to Protofab staff should you need five minutes or more of plasma time.
• The maximum plasma power is 0.300 kW and will be locked at this setting.