Recipes: Plasma Treatment: Difference between revisions
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The following is a baseline recipe for plasma cleaning. Oxygen plasma can be used for cleaning organic contamination, while Argon plasma can clean surface oxide. |
The following is a baseline recipe for plasma cleaning. Oxygen plasma can be used for cleaning organic contamination, while Argon plasma can clean surface oxide contamination. |
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|+Baseline Plasma Cleaning Recipe |
|+Baseline Plasma Cleaning Recipe |
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|80 sec |
|80 sec |
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|3 sec |
|3 sec |
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|60 sec |
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|35 sec |
|35 sec |
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|0.300 kW |
|0.300 kW |
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* |
* You may run gases in a two-sequence plasma cycle (GAS 1/A followed by GAS 2/B) or in individual single gas sequences. Running gases in sequence will result in lower pressure reading. |
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* Run multiple cycles if longer plasma time is needed, rather than altering baseline recipe. Recipe settings may only be altered by Protofab Staff |
* Run multiple cycles if longer plasma time is needed (up to two minutes), rather than altering baseline recipe. Recipe settings may only be altered by Protofab Staff. Reach out to Protofab staff should you need five minutes or more of plasma time. |
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* The maximum plasma power is 0.300 kW and will be locked at this setting. |
* The maximum plasma power is 0.300 kW and will be locked at this setting. |
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Latest revision as of 08:15, 14 September 2026
The following is a baseline recipe for plasma cleaning. Oxygen plasma can be used for cleaning organic contamination, while Argon plasma can clean surface oxide contamination.
| Gas | Pump down time | Purge time | Plasma time | Vent time | Plasma Power |
|---|---|---|---|---|---|
| A) Oxygen | 80 sec | 3 sec | 60 sec | 35 sec | 0.300 kW |
| B) Argon | 80 sec | 3 sec | 60 sec | 35 sec | 0.300kW |
- You may run gases in a two-sequence plasma cycle (GAS 1/A followed by GAS 2/B) or in individual single gas sequences. Running gases in sequence will result in lower pressure reading.
- Run multiple cycles if longer plasma time is needed (up to two minutes), rather than altering baseline recipe. Recipe settings may only be altered by Protofab Staff. Reach out to Protofab staff should you need five minutes or more of plasma time.
- The maximum plasma power is 0.300 kW and will be locked at this setting.